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High Density Plasma Sources

Author: Oleg A. Popov
Publisher: William Andrew
ISBN: 9780080946160
Size: 63.75 MB
Format: PDF
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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.

High Density Plasma Sources

Author: Oleg A. Popov
Publisher: Elsevier
ISBN: 0815517890
Size: 37.90 MB
Format: PDF, Kindle
View: 4301
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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.

Nonthermal Plasma Chemistry And Physics

Author: Jurgen Meichsner
Publisher: CRC Press
ISBN: 1420059211
Size: 47.89 MB
Format: PDF, ePub
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In addition to introducing the basics of plasma physics, Nonthermal Plasma Chemistry and Physics is a comprehensive presentation of recent developments in the rapidly growing field of nonthermal plasma chemistry. The book offers a detailed discussion of the fundamentals of plasma chemical reactions and modeling, nonthermal plasma sources, relevant diagnostic techniques, and selected applications. Elucidating interconnections and trends, the book focuses on basic principles and illustrations across a broad field of applications. Expert contributors address environmental aspects of plasma chemistry. The book also includes selected plasma conditions and specific applications in volume plasma chemistry and treatment of material surfaces such as plasma etching in microelectronics, chemical modification of polymer surfaces and deposition of functional thin films. Designed for students of plasma physics, Nonthermal Plasma Chemistry and Physics is a concise resource also for specialists in this and related fields of research.

Materials Science Of Thin Films

Author: Milton Ohring
Publisher: Academic Press
ISBN: 0125249756
Size: 54.63 MB
Format: PDF, ePub
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This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded reference books to the AP list, including Reliability and Failure of Electronic Materials and the Engineering Science of Thin Films. The knowledge base is intended for science and engineering students in advanced undergraduate or first-year graduate level courses on thin films and scientists and engineers who are entering or require an overview of the field. Since 1992, when the book was first published, the field of thin films has expanded tremendously, especially with regard to technological applications. The second edition will bring the book up-to-date with regard to these advances. Most chapters have been greatly updated, and several new chapters have been added.

Plasma And Fusion Science

Author: B. Raneesh
Publisher: CRC Press
ISBN: 1771884541
Size: 50.19 MB
Format: PDF, ePub, Mobi
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In this new book, an interdisciplinary and international team of experts provides an exploration of the emerging plasma science that is poised to make the plasma technology a reality in the manufacturing sector. The research presented here will stimulate new ideas, methods, and applications in the field of plasma science and nanotechnology. Plasma technology applications are being developed that could impact the global market for power, electronics, mineral, and other fuel commodities. Currently, plasma science is described as a revolutionary discipline in terms of its possible impact on industrial applications. It offers potential solutions to many problems using emerging techniques. In this book the authors provide a broad overview of recent trends in field plasma science and nanotechnology. Divided into several parts, Plasma and Fusion Science: From Fundamental Research to Technological Applications explores some basic plasma applications and research, space and atmospheric plasma, nuclear fusion, and laser plasma and industrial applications of plasma. A wide variety of cutting-edge topics are covered, including: • basic plasma physics • computer modeling for plasma • exotic plasma (including dusty plasma) • industrial plasma applications • laser plasma • nuclear fusion technology • plasma diagnostics • plasma processing • pulsed power • space astrophysical plasma • plasma and nanotechnology Pointing to current and possible future developments in plasma science and technology, the diverse research presented here will be valuable for researchers, scientists, industry professionals, and others involved in the revolutionary field of plasma and fusion science.

Principles Of Plasma Discharges And Materials Processing

Author: Michael A. Lieberman
Publisher: John Wiley & Sons
ISBN: 0471724246
Size: 74.63 MB
Format: PDF, ePub, Docs
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A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals. The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. New and expanded topics include: * Updated cross sections * Diffusion and diffusion solutions * Generalized Bohm criteria * Expanded treatment of dc sheaths * Langmuir probes in time-varying fields * Electronegative discharges * Pulsed power discharges * Dual frequency discharges * High-density rf sheaths and ion energy distributions * Hysteresis and instabilities * Helicon discharges * Hollow cathode discharges * Ionized physical vapor deposition * Differential substrate charging With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.

Materials Under Extreme Conditions

Author: A.K. Tyagi
Publisher: Elsevier
ISBN: 0128014423
Size: 40.12 MB
Format: PDF, ePub, Mobi
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Materials Under Extreme Conditions: Recent Trends and Future Prospects analyzes the chemical transformation and decomposition of materials exposed to extreme conditions, such as high temperature, high pressure, hostile chemical environments, high radiation fields, high vacuum, high magnetic and electric fields, wear and abrasion related to chemical bonding, special crystallographic features, and microstructures. The materials covered in this work encompass oxides, non-oxides, alloys and intermetallics, glasses, and carbon-based materials. The book is written for researchers in academia and industry, and technologists in chemical engineering, materials chemistry, chemistry, and condensed matter physics. Describes and analyzes the chemical transformation and decomposition of a wide range of materials exposed to extreme conditions Brings together information currently scattered across the Internet or incoherently dispersed amongst journals and proceedings Presents chapters on phenomena, materials synthesis, and processing, characterization and properties, and applications Written by established researchers in the field

Science And Engineering Of Materials Si Edition

Author: Donald R. Askeland
Publisher: Cengage Learning
ISBN: 130544633X
Size: 39.61 MB
Format: PDF, ePub, Docs
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Succeed in your materials science course with THE SCIENCE AND ENGINEERING OF MATERIALS, 7e. Filled with built-in study tools to help you master key concepts, this proven book will help you develop an understanding of the relationship between structure, processing, and properties of materials and will serve as a useful reference for future courses in manufacturing, materials, design, or materials selection. Important Notice: Media content referenced within the product description or the product text may not be available in the ebook version.

Microwave Discharges

Author: Carlos M. Ferreira
Publisher: Springer Science & Business Media
ISBN: 1489911308
Size: 26.46 MB
Format: PDF, Mobi
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Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992